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BrooksBrooks Direct Liquid Injection Vaporisers
The Brooks family of extremely high-performing direct liquid injection (DLI) vaporizer solutions is designed for customers who require reliable liquid vaporization.

Featuring unique atomization and heat exchanger technologies, Brooks direct liquid injection vaporizers deliver pure vapour for every application. Applications include:

  • Water vaporization for fuel cell stack humidification and many other water addition applications.
  • Liquid precursor vaporization for chemical vapour deposition (CVD)
  • Metal oxide chemical vapour deposition (MOCVD)
  • Atomic layer deposition (ALD)
  • Depositing thin films for enhanced thermal, optical, or hardness characteristics such as diamond-like carbon coating and glass coating.
  • Vaporizing monomers for vacuum polymer film deposition Generating calibration vapour
  • Vaporizing liquid hydrocarbons
Direct Liquid Injection VaporisersView Data SheetDirect Liquid Injection VaporisersVisit Website
Direct Liquid Injection Vaporisers

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